Special Issue/Trends and Future of Corrosion Measurement Techniques. Modern Ellipsometry. Spectroscopic Ellipsometry and Infrared Ellipsometry.

Application of spectroscopic ellipsometry and Mueller ellipsometry to optical characterization.

This article provides a brief overview of both established and novel ellipsometry techniques, as well as their applications. Ellipsometry is an indirect optical technique, in that information about the physical properties of a sample is obtained through modeling analysis. Standard ellipsometry is typically used to characterize optically isotropic bulk and/or layered materials. More advanced tec...

Spectroscopic ellipsometry study

The dielectric functions of InP, IIla.53 Gao.47 As, and 1110.75 Gao.2S Aso.s P 0.5 epitaxial layers have been measured using a polarization-modulation spectroscopic ellipsometer in the 1.5 to 5.3 eV region. The oxide removal procedure has been carefully checked by comparing spectroscopic ellipsometry and x-ray photoelectron spectroscopy measurements. These reference data have been used to inves...

Infrared spectroscopic ellipsometry: a tool for characterizing nanometer layers†

Ellipsometry is applied with visible light even for routine applications in industry. The technique provides two results, the so-called ellipsometric parameters which originally were meant to specify the elliptical polarization of reflected radiation. The two parameters can be used to determine simultaneously two quantities of the sample such as thickness and refractive index of a surface layer...

Rotatable broadband retarders for far-infrared spectroscopic ellipsometry

Progress in spectroscopic ellipsometry: Applications from vacuum ultraviolet to infrared

Spectroscopic ellipsometry ͑SE͒ is a noncontact and nondestructive optical technique for thin film characterization. In the past 10 yr, it has migrated from the research laboratory into the semiconductor, data storage, display, communication, and optical coating industries. The wide acceptance of SE is a result of its flexibility to measure most material types: dielectrics, semiconductors, metals...